Chemical | CAS# | UN# | Health Code Numbers | |||||||||
---|---|---|---|---|---|---|---|---|---|---|---|---|
Hexamethyldisilazane | 999-97-3 | 1993 |
14.01
11.00
14.02
7.01
8.00
4.08
4.07
3.05
3.10
7.11
|
|||||||||
Formula | Synonyms | |||||||||||
C6H19NSi2 | HEXAMETHYL DISILAZANE, 1,1,1,3,3,3-HEXAMETHYLDISILAZANE, BIS(TRIMETHYLSILYL)AMINE, DI(TRIMETHYLSILYL)AMINE, DISILAZANE, 1,1,1,3,3,3-HEXAMETHYL-, HEXAMETHYLDISILAZANE, HEXAMETHYLDISILYLAMINE, HMDS, HMDS (SILAZANE), HMDS 3, LS 7150, OAP, SZ 6079, TSL 8802 |
Mol Wt | State | MP (°C) | BP (°C) | VP (Hg) | VP (°C) | SG | LEL (ppm) |
---|---|---|---|---|---|---|---|
161.44 | L | 125 | 13.8 | 25 | 0.76 |
PAC-1 | PAC-2 | PAC-3 |
---|---|---|
5.8 | 64 | 380 |
PAC-1 | PAC-2 | PAC-3 |
---|---|---|
0.88 | 9.7 | 58 |