PAC Database - Detailed Chemical Data
Chemical Identity
| Chemical | CAS# | UN# | Health Code Numbers | |||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Silicon tetrafluoride; (Tetrafluorosilane) | 7783-61-1 | 1859 |
14.01
11.01
14.02
7.01
7.00
4.01
11.00
4.09
4.06
4.10
|
|||||||||
| Formula | Synonyms | |||||||||||
| F4Si | SILICON TETRAFLUORIDE, PERFLUOROSILANE, SILICON FLUORIDE, SILICON FLUORIDE (SIF4), SILICON TETRAFLUORIDE, COMPRESSED, TETRAFLUOROSILANE, TÉTRAFLUORURE DE SILICIUM (DOT FRENCH), TÉTRAFLUORURE DE SILICIUM, COMPRIMÉ (DOT FRENCH), TETRAFLUORURO DE SILICIO (DOT SPANISH), TETRAFLUORURO DE SILICIO, COMPRIMIDO (DOT SPANISH) | |||||||||||
Physical Properties
| Mol Wt | State | MP (°C) | BP (°C) | VP (Hg) | VP (°C) | SG | LEL (ppm) |
|---|---|---|---|---|---|---|---|
| 104.09 | G | -77 |
PAC Values
| PAC-1 | PAC-2 | PAC-3 |
|---|---|---|
| 0.050 | 3.3 | 10 |
| PAC-1 | PAC-2 | PAC-3 |
|---|---|---|
| 0.21 | 14 | 43 |
Technical Basis
A review of available sources identified AEGLs for this chemical. The AEGLs were selected due to their priority among Protective Action Criteria (Section 1). Values in units mg/m3 are reported as published in the technical support Table 1, per guidance (Section 3.4.7.2).
• PAC-1 = AEGL-1
• PAC-2 = AEGL-2
• PAC-3 = AEGL-3
This review generated PAC ppm values consistent with Rev. 29A. Minor differences in the reported PAC-3 values in units mg/m3 may be due to conversion and rounding of these values, instead of use of source values.
• PAC-1 = AEGL-1
• PAC-2 = AEGL-2
• PAC-3 = AEGL-3
This review generated PAC ppm values consistent with Rev. 29A. Minor differences in the reported PAC-3 values in units mg/m3 may be due to conversion and rounding of these values, instead of use of source values.
References
AEGLs (Table 1) and chemical information (Table 2) retrieved from: https://www.epa.gov/aegl/silicon-tetrafluoride-results-aegl-program